Capacitive silicon micromachined gyro with mechanical coupling for sensitive signal reading 3

The actual mechanical coupling exists in the following aspects:

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Capacitive silicon micromachined gyro with mechanical coupling for sensitive signal reading 4

Figure 2 Sensitive acceleration generated under the influence of measured Coriolis force and mechanical coupling

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Capacitive silicon micromachined gyro with mechanical coupling for sensitive signal reading 5

Based on the above analysis, sensitive signals should be collected when the mechanical coupling is at its minimum.

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